玻璃光刻版  glass mask

电子投影金属版印刷-电子投影光刻  electron beam lithography

光电刻版机  scan-a-sizer

光刻掩模版  mask

光学平版刻法  OLAP; optical isolator

远紫外线金属版印刷远紫外光刻  extrapolation

193nmArF激光光刻  193nm ArF laser lithography

EUV光刻光源  EUV source

X光光刻  X-ray lithography

X射线荧光光光谱  X-ray fluorescence spectrometry

激光光刻  Laser photolithography; laser marking; Laser photoetching; laser lithography

激光光刻技术  laser lithography

激光光刻系统  Laser lithographic system

原子荧光光光谱法  hg-afs

准分子激光光刻  excimer laser lithography

准分子激光光刻技术  Excimer laser Microlithography

,激光光解  pulse radiolysis

0.5μm分步光刻机  mStepper

157nmF2光刻机  157 nm F2 stepper