玻璃光刻版 glass mask
电子投影金属版印刷-电子投影光刻 electron beam lithography
光电刻版机 scan-a-sizer
光刻掩模版 mask
光学平版刻法 OLAP; optical isolator
远紫外线金属版印刷远紫外光刻 extrapolation
193nmArF激光光刻 193nm ArF laser lithography
EUV光刻光源 EUV source
X光光刻 X-ray lithography
X射线荧光光光谱 X-ray fluorescence spectrometry
激光光刻 Laser photolithography; laser marking; Laser photoetching; laser lithography
激光光刻技术 laser lithography
激光光刻系统 Laser lithographic system
原子荧光光光谱法 hg-afs
准分子激光光刻 excimer laser lithography
准分子激光光刻技术 Excimer laser Microlithography
,激光光解 pulse radiolysis
0.5μm分步光刻机 mStepper
157nmF2光刻机 157 nm F2 stepper