光蚀刻法  Photoetching

光辅助电化学刻蚀法  PAECE

光辅助湿法刻蚀  Wet-etching

193nmArF激光光刻  193nm ArF laser lithography

EUV光刻光源  EUV source

X光光刻  X-ray lithography

X射线荧光光光谱  X-ray fluorescence spectrometry

步进式曝光蚀刻  optical stepper lithography

超紫外光蚀刻技术  extreme uitraviolet lithography

电镀结合光刻法  electroplating and lithography method

光刻法  photolithography; photolithographic technique; photolithographic beam; photoresist process; photomasking; photoprocessing; photo-etching

光刻法的  photolithgraphic

光刻蚀  Photoetching; photoengraving

光刻蚀清晰度  Photolithographic resolution

光蚀刻  optical lithogrpahy; optical printing; Photoetching; ablation

光蚀刻清晰度  optical lithographic resolution

光蚀刻微影  photolithography

化学抛光刻蚀  chemical polish etching

激光光刻  Laser photolithography; laser marking; Laser photoetching; laser lithography