157nm光学光刻  157um optical lithography; 157nm optical lithography

193nm光学光刻  nm optical lithography

传统光学投影光刻  conventional optical projection lithography

分辨率增强光刻辅助化学收缩  bias-Temperature

光电化学刻蚀  photo electrochemical etching

光电化学蚀刻  Photo-electrochemical etching

光辅助电化学刻蚀法  PAECE

光化学蚀刻  optical chemical etching; Photo chemical matching

光学工具刻度尺  optical tooling scale

光学平版刻法  OLAP; optical isolator

光学投影蚀刻  optical projection lithography

化学抛光刻蚀  chemical polish etching

积体光学蚀刻  lithography; integrated optics

激光辅助化学刻蚀  laser assisted chemical etching

激光化学刻蚀  laser assisted chemical etching; laser chemical etching

光学-光学双共振  Optical-optical double resonance

193nmArF激光光刻  193nm ArF laser lithography

EUV光刻光源  EUV source

X光光刻  X-ray lithography