平行板等离子体腐蚀装置  parallel plate plasma etcher

等离子体腐蚀  plasma etching

等离子体腐蚀器  plasma etcher

等离子体离子辅助镀膜  plasma assisted deposition

等离子体离子源  plasma ion implantation

等离子体离子振荡  plasma ion oscillation

等离子体离子注入  plasma ion implantation

高频等离子体腐蚀  radio frequency plasma etch

高温等离子体装置  hot plasma device

氦离子等离子体  He plasma

离子等离子体频率  ion plasma frequency

平面式等离子体腐蚀器  planar plasma etcher; planar plasma reactor

微波等离子体腐蚀  microwave plasma etching

微波等离子体离子化检测器  microwave induced plasma ionization detector

重离子等离子体加速器  heavy ion plasma accelerator

自由基等离子体腐蚀  radical plasma etching

磁控管离子腐蚀装置  magnetron ion etcher

面向等离子体材料  plasma facing materials PFM; plasma facing materials; tungsten

任意磁化方向等离子体  Arbitrary magnetized direction plasma