环形微变形镜 Ring micromirror
微机械薄膜变形镜 micromachine membrane deformable mirror; micromachined membrane deformable mirror; MMDM
微机械薄膜变形镜(MMDM) advanced polysilicon self aligned process
表面微加工工艺 Surface-micromachining process
超微孔薄膜加工 machining of ultra micro-perforated membrane
硅微加工工艺 MEMS
体硅微加工工艺 silicon bulk micromachining; bulk-micromachining; bulk silicon micromachining
微变形镜 MEMS-DMs; micro deformable mirrors; deformable mirror; deformable micro-mirror
微薄薄膜 microthin film
微加工工艺 micro machining; MEMS; MEMS process
半固态加工变形 semi-solid deformation
变形加工 forging process; texturing processing; plastic processing; texturing; Working process
变形加工度 deformation work
薄膜加工 thin film fabrication
加工变形 milling deformation; machining deformation; Deformation; machining errors; deformation of machining; machining deflection; Machining deformations; machining distortion; Distortion; processing distortion
可加工变形性 machine deforming character
冷变形加工 mechanical property
冷加工变形 cold working deformation
冷加工变形率 the rate of cold-drawn