未显影光刻胶  resist scum

光刻胶显影剂  photoresist developer

光刻胶显影检查  develop check

自显影光刻胶  self developing resist

臭氧生成  ozone production

臭氧生成效率  ozone production efficiency

臭氧形成  ozone formation

激生感生光解  laser induced photodissociation

紫外线敏感光刻胶  ultraviolet resist

光刻－成形－翻边－定型  Photolithography-forming sphere-flanging-finalizin

变成臭氧  ozonize

产生臭氧物质  ozone-forming species

臭氧/光催化  combined ozone and photocatalysis

臭氧光催化  ozone enhanced photocatalysis; combined photocatalysis and ozonation

臭氧光化学  ozone photochemistry

臭氧光化学产生  photochemical ozone productions

臭氧光谱学  ozone spectroscopy

臭氧-生物沸石  ozone-biological zeolite

臭氧生物活性炭  ozone-biological activated carbon(O3-BAC