步进扫描投影光刻机
step-and-scan lithography system
step and scan projection lithography
自动投影光刻机
automatic projection photoetching machine
投影光学系统
projection optics system
projection optical system
投影光刻系统
lithography projection system
投影光刻法
projection photolithography
扫描投影光刻机
scanning projection lithography tool
分步重复投影光刻曝光
projection lithography exposure